JPH0261136B2 - - Google Patents

Info

Publication number
JPH0261136B2
JPH0261136B2 JP20775287A JP20775287A JPH0261136B2 JP H0261136 B2 JPH0261136 B2 JP H0261136B2 JP 20775287 A JP20775287 A JP 20775287A JP 20775287 A JP20775287 A JP 20775287A JP H0261136 B2 JPH0261136 B2 JP H0261136B2
Authority
JP
Japan
Prior art keywords
heat sink
crystal
internal heat
quartz tube
growth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP20775287A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6450518A (en
Inventor
Takahiro Kanba
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Stanley Electric Co Ltd
Original Assignee
Stanley Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Stanley Electric Co Ltd filed Critical Stanley Electric Co Ltd
Priority to JP20775287A priority Critical patent/JPS6450518A/ja
Publication of JPS6450518A publication Critical patent/JPS6450518A/ja
Publication of JPH0261136B2 publication Critical patent/JPH0261136B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP20775287A 1987-08-21 1987-08-21 Apparatus for liquid growth of semiconductor crystal Granted JPS6450518A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20775287A JPS6450518A (en) 1987-08-21 1987-08-21 Apparatus for liquid growth of semiconductor crystal

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20775287A JPS6450518A (en) 1987-08-21 1987-08-21 Apparatus for liquid growth of semiconductor crystal

Publications (2)

Publication Number Publication Date
JPS6450518A JPS6450518A (en) 1989-02-27
JPH0261136B2 true JPH0261136B2 (en]) 1990-12-19

Family

ID=16544958

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20775287A Granted JPS6450518A (en) 1987-08-21 1987-08-21 Apparatus for liquid growth of semiconductor crystal

Country Status (1)

Country Link
JP (1) JPS6450518A (en])

Also Published As

Publication number Publication date
JPS6450518A (en) 1989-02-27

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